Standard Practice for Scanning Electron Microscope Beam Size Characterization

Importancia y uso:

4.1 The traditional resolution test of the SEM requires, as a first step, a photomicrograph of a fine particulate sample taken at a high magnification. The operator is required to measure a distance on the photomicrograph between two adjacent, but separate edges. These edges are usually less than one millimetre apart. Their image quality is often less than optimum limited by the S/N ratio of a beam with such a small diameter and low current. Operator judgment is dependent on the individual acuity of the person making the measurement and can vary significantly.

4.2 Use of this practice results in SEM electron beam size characterization which is significantly more reproducible than the traditional resolution test using a fine particulate sample.

Subcomité:

E04.11

Referida por:

D8544-24, F0561-19

Volúmen:

03.01

Número ICS:

31.120 (Electronic display devices), 37.020 (Optical equipment)

Palabras clave:

electron beam size; E766; graphite fiber; magnification; NIST–SRM 2069B; resolution; SEM; SEM performance; spot size; waveform ;