Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry

Importancia y uso:

4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices.

4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument.

Subcomité:

D19.05

Volúmen:

11.01

Número ICS:

71.060.01 (Inorganic chemicals in general)

Palabras clave:

anions; contamination control; high purity; ion chromatography; trace analysis; ultrapure water;