Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode

Importancia y uso:

5.1 Test Method A—This test method is the most frequently used in leak testing components. Testing of components is correlated to a standard leak, and the actual leak rate is measured. Acceptance is based on the maximum system allowable leakage. For most production needs, acceptance is based on acceptance of parts leaking less than an established leakage rate, which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with the standard leak located at a representative place on the test volume. As the volume tends to be large (>1 m³) and there are often low conductance paths involved, a check of the response time as well as system sensitivity should be made.

5.2 Test Method B—This test method is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test, or conditioning parts. As with Test Method A, the response time and a system sensitivity check may be required for large volumes.

5.3 Test Method C—This test method is to be used only when there is no convenient method of connecting the LD to the outlet of the high-vacuum pump. If a helium LD is used and the high-vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle, as these pumps leave a relatively high percentage of helium in the high-vacuum chamber. This will limit the maximum sensitivity that can be obtained.

Subcomité:

E07.08

Referida por:

E2533-21

Volúmen:

03.03

Número ICS:

23.040.99 (Other pipeline components)

Palabras clave:

helium leak test; helium mass spectrometer leak test; hood leak test; leak testing; mass spectrometer leak test;