Standard Practice for Leaks Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Tracer Probe Mode

Importancia y uso:

6.1 Test Method A is the most frequently used in leak testing components which are structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10⁻³ torr). Testing of small components can be correlated to calibrated leaks, and the actual leak rate can be measured or acceptance can be based on a maximum allowable leak. For most production needs acceptance is based on acceptance of parts leaking less than an established standard which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with reference leak at a representative place on the test volume. Leak rates are determined by calculating the net gain or loss through a leak in the test part that would cause failure during the expected life of the device.

6.2 Test Method B is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test or for conditioning parts. As the volume tends to be large, a check of the response time as well as system sensitivity should be made. Volume of the system in liters divided by the speed of the vacuum pump in L/s will give the response time to reach 63 % of the total signal. Response times in excess of a few seconds makes leak detection difficult.

6.3 Test Method C is to be used only when there is no convenient method of connecting the leak detector to the outlet of the high vacuum pump. If a helium leak detector is used and the high vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle as these pumps leave a relatively high percentage of helium in the high vacuum chamber. This will obscure all but large leaks, and the trace gas will quickly saturate the pumps.

Subcomité:

E07.08

Referida por:

E2533-21

Volúmen:

03.03

Número ICS:

19.100 (Non-destructive testing)

Palabras clave:

bell jar leak test; bomb mass spectrometer leak test; helium lead testing; helium leak test; leak testing; mass spectrometer leak testing; sealed object mass spectrometer leak test ;