Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode

Importancia y uso:

6.1 Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance characteristics will not be affected by in-leakage of air, water vapor or other contaminants over the projected life expected. Care must be taken to control the bombing pressure, bombing time and dwell time after bombing or the results can vary substantially.

Subcomité:

E07.08

Referida por:

E2533-21, E2982-21

Volúmen:

03.03

Número ICS:

19.100 (Non-destructive testing)

Palabras clave:

bell jar leak test; bomb mass spectrometer leak test; helium leak test; helium leak testing; leak testing; mass spectrometer leak testing; sealed object mass spectrometer leak test ;