Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments

Importancia y uso:

5.1 This practice provides a standard approach to measuring particle deposition, or fallout, in cleanrooms and other controlled environments. It is based on the use of a witness surface to collect particles that deposit from the surrounding environment and subsequently sizing and counting the particles by conventional methods. Several options are introduced, with limitations and guidelines for selecting the best choice for the intended application.

5.2 This practice is applicable across numerous industries including aerospace, microelectronics, and pharmaceuticals.

Subcomité:

E21.05

Referida por:

E2352-19, E2312-11R19, E2217-12R19

Volúmen:

15.03

Número ICS:

13.040.35 (Cleanrooms and associated controlled environments)

Palabras clave:

cleanroom; contamination control; controlled environment;