Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

Subcomité:

E21.05

Referida por:

F0051_F0051M-20

Volúmen:

15.03

Número ICS:

13.040.30 (Workplace atmospheres)

Palabras clave:

airborne particle concentration; cleanroom; contamination; macroparticle ;