Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy

Importancia y uso:

5.1 This test method provides for accurate and reproducible enumeration of particles and fibers released from a wiper immersed in a cleaning solution with moderate mechanical stress applied. When performed correctly, this counting test method is sensitive enough to quantify very low levels of total particle and fiber burden. The results are accurate and not influenced by artifact or particle size limitations. A further advantage to this technique is that it allows for morphological as well as X-ray analysis of individual particles.

Subcomité:

E21.05

Referida por:

E2312-11R19

Volúmen:

15.03

Número ICS:

13.040.35 (Cleanrooms and associated controlled environments)

Palabras clave:

cleanroom wipers; contamination control; membrane filter; optical microscopy; particle counting and sizing; particles and fibers; scanning electron microscopy;