Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy

Importancia y uso:

5.1 This guide covers procedures for quantifying the elemental composition of phases in a microstructure. It includes both methods that use standards as well as standardless methods, and it discusses the precision and accuracy that one can expect from the technique. The guide applies to EDS with a solid-state X-ray detector used on an SEM or EPMA.

5.2 EDS is a suitable technique for routine quantitative analysis of elements that are 1) heavier than or equal to sodium in atomic weight, 2) present in tenths of a percent or greater by weight, and 3) occupying a few cubic micrometres, or more, of the specimen. Elements of lower atomic number than sodium can be analyzed with either ultra-thin-window or windowless spectrometers, generally with less precision than is possible for heavier elements. Trace elements, defined as <1.0 %,² can be analyzed but with lower precision compared with analyses of elements present in greater concentration.

Subcomité:

E04.11

Referida por:

E2142-08R23, F0628-23

Volúmen:

03.01

Número ICS:

71.040.50 (Physicochemical methods of analysis)

Palabras clave:

EDS; elemental analysis; energy-dispersive spectroscopy; light element; matrix correction; microanalysis; phi-rho-z; quantitative analysis; spectrum; standardless analysis; standards; X ray; X-ray microanalysis; ZAF ;