Standard Guide for Performing Sputter Crater Depth Measurements

Importancia y uso:

4.1 Sputter crater depth measurements are performed in order to determine a sputter rate (depth/time) for each matrix sputtered during a sputter depth profile or similar in-depth type analyses. From sputter rate values, a linear depth scale can be calculated and displayed for the sputter depth profile.

4.2 Data obtained from surface profilometry are useful in monitoring instrumental parameters (for example, raster size, shape, and any irregularities in topography of the sputtered crater) used for depth profiles.

Subcomité:

E42.06

Referida por:

E2735-14R20

Volúmen:

03.06

Número ICS:

71.040.50 (Physicochemical methods of analysis)

Palabras clave:

Auger electron spectroscopy; secondary ion mass spectrometry; stylus profilometry; surface analysis ; X-ray photoelectron spectroscopy;