Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

Importancia y uso:

4.1 When electron beam excitation is used in AES, the incident electron beam can interact with the specimen material causing physical and chemical changes. In general, these effects are a hindrance to AES analysis because they cause localized specimen modification (1-4).5

4.2 With specimens that have poor electrical conductivity the electron beam can stimulate the development of localized charge on the specimen surface. This effect is a hindrance to AES analysis because the potentials associated with the charge can either adversely affect the integrity of Auger data or make Auger data collection difficult (5, 6).

Subcomité:

E42.03

Referida por:

E0996-19, E0984-12R20, E1078-14R20

Volúmen:

03.06

Número ICS:

17.180.30 (Optical measuring instruments)

Palabras clave:

Auger electron spectroscopy; charging; electron beam; electron beam damage ;