Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

Importancia y uso:

4.1 This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since contamination can lead to an unacceptable, low yield of electronic devices.

4.2 The range of water purity is defined in accordance with the manufacturing process. The types of ultra-pure water are defined with respect to device line width. In all cases, the water-quality recommendations apply at the point of distribution.

4.3 The limits on the impurities are related to current contamination specifications and to available analytical methods (either performed in a suitable clean laboratory or by on-line instrumentation). On-line and off-line methods are used in accordance with current industry practice. Concentration of the sample may be required to measure the impurities at the levels indicated in Table 1.

(A) The user should be advised that analytical data often are instrument dependent and technique dependent. Thus, the numbers in Table 1 are only guidelines. This table will be revised whenever the semiconductor industry develops new linewidths, thereby keeping the guidelines current.(B) Values shown in Type E-1.3 are a result of aligning ITRS risk factors of known contaminates to the production processes found in current semiconductor processing for the linewidth of interest and may differ in a few cases to those found in Type E-1.2. Users who wish to use the higher numbers for Type E-1.2 water should feel free to do so.

All values are equal to or less than with the exception of Resistivity.

(C) Boron is monitored only as an operational parameter for monitoring the ion-exchange beds.

Subcomité:

D19.02

Referida por:

D5196-06R18, D5544-16R23, D7980-15R23

Volúmen:

11.01

Número ICS:

13.060.25 (Water for industrial use), 71.100.99 (Other products of the chemical industry)

Palabras clave:

electronic; microelectronics; semiconductor; ultra-pure water;