Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films

Subcomité:

E08.02

Volúmen:

03.01

Número ICS:

01.040.31 (Electronics (Vocabularies)), 31.240 (Mechanical structures for electronic equipment)

Palabras clave:

cantilevers; definitions; fixed-fixed beams; interferometry; length measurements; microelectromechanical systems; MEMS; polysilicon; residual strain; stiction; strain gradient; terminology; test structure;